Ferroelectric and dielectric study of strontium tantalum based perovskite oxynitride films deposited by reactive rf magnetron sputtering.
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| Title: | Ferroelectric and dielectric study of strontium tantalum based perovskite oxynitride films deposited by reactive rf magnetron sputtering. |
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| Authors: | Le Paven, C.1 claire.lepaven@univ-rennes1.fr, Benzerga, R.1, Ferri, A.2, Fasquelle, D.3, Laur, V.4, Le Gendre, L.1, Marlec, F.1, Tessier, F.5, Cheviré, F.5, Desfeux, R.2, Saitzek, S.2, Castel, X.1, Sharaiha, A.1 |
| Source: | Materials Research Bulletin. Dec2017 Part 2, Vol. 96, p126-132. 7p. |
| Database: | Academic Search Ultimate |
| ISSN: | 00255408 |
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| DOI: | 10.1016/j.materresbull.2016.11.030 |
