View in EDS PDF Full Text

OTIMIZAÇÃO DO TRANSDUTOR DE PRESSÃO DE SEMICONDUTORES COM ELEMENTO SENSÍVEL BASEADO NA ESTRUTURA DE "SILÍCIO SOBRE SAFIRA".

Saved in:
Bibliographic Details
Title: OTIMIZAÇÃO DO TRANSDUTOR DE PRESSÃO DE SEMICONDUTORES COM ELEMENTO SENSÍVEL BASEADO NA ESTRUTURA DE "SILÍCIO SOBRE SAFIRA".
Alternate Title: OPTIMIZATION OF SEMICONDUCTOR PRESSURE TRANSDUCER WITH SENSITIVE ELEMENT BASED ON "SILICON ON SAPPHIRE" STRUCTURE.
ОПТИМИЗАЦИЯ ПОЛУПРОВОДНИКОВОГО ТЕНЗОПРЕОБРАЗОВАТЕЛЯ ДАВЛЕНИЯ С ЧУВСТВИТЕЛЬНЫМ ЭЛЕМЕНТОМ НА ОСНОВЕ СТРУКТУРЫ «КРЕМНИЙ НА САПФИРЕ»
Authors: GAVRYUSHIN, Sergey S.1, SKVORTSOV, Pavel A.2 SkvortsovPA@ya.ru, SKVORTSOV, Arkady A.2
Source: Periódico Tchê Química. 2018, Vol. 15 Issue 30, p678-686. 9p.
Database: Academic Search Ultimate
FullText Links:
  – Type: pdflink
Text:
  Availability: 0
Header DbId: asn
DbLabel: Academic Search Ultimate
An: 131037375
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: OTIMIZAÇÃO DO TRANSDUTOR DE PRESSÃO DE SEMICONDUTORES COM ELEMENTO SENSÍVEL BASEADO NA ESTRUTURA DE "SILÍCIO SOBRE SAFIRA".
– Name: TitleAlt
  Label: Alternate Title
  Group: TiAlt
  Data: OPTIMIZATION OF SEMICONDUCTOR PRESSURE TRANSDUCER WITH SENSITIVE ELEMENT BASED ON "SILICON ON SAPPHIRE" STRUCTURE.<br />ОПТИМИЗАЦИЯ ПОЛУПРОВОДНИКОВОГО ТЕНЗОПРЕОБРАЗОВАТЕЛЯ ДАВЛЕНИЯ С ЧУВСТВИТЕЛЬНЫМ ЭЛЕМЕНТОМ НА ОСНОВЕ СТРУКТУРЫ «КРЕМНИЙ НА САПФИРЕ»
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22GAVRYUSHIN%2C+Sergey+S%2E%22">GAVRYUSHIN, Sergey S.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AR" term="%22SKVORTSOV%2C+Pavel+A%2E%22">SKVORTSOV, Pavel A.</searchLink><relatesTo>2</relatesTo><i> SkvortsovPA@ya.ru</i><br /><searchLink fieldCode="AR" term="%22SKVORTSOV%2C+Arkady+A%2E%22">SKVORTSOV, Arkady A.</searchLink><relatesTo>2</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Periódico+Tchê+Química%22">Periódico Tchê Química</searchLink>. 2018, Vol. 15 Issue 30, p678-686. 9p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=131037375
RecordInfo BibRecord:
  BibEntity:
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 9
        StartPage: 678
    Titles:
      – TitleFull: OTIMIZAÇÃO DO TRANSDUTOR DE PRESSÃO DE SEMICONDUTORES COM ELEMENTO SENSÍVEL BASEADO NA ESTRUTURA DE "SILÍCIO SOBRE SAFIRA".
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: GAVRYUSHIN, Sergey S.
      – PersonEntity:
          Name:
            NameFull: SKVORTSOV, Pavel A.
      – PersonEntity:
          Name:
            NameFull: SKVORTSOV, Arkady A.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 07
              Text: 2018
              Type: published
              Y: 2018
          Identifiers:
            – Type: issn-print
              Value: 18060374
          Numbering:
            – Type: volume
              Value: 15
            – Type: issue
              Value: 30
          Titles:
            – TitleFull: Periódico Tchê Química
              Type: main
ResultId 1