Structural and optical properties of amorphous Si–Ge–Te thin films prepared by combinatorial sputtering.
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| Title: | Structural and optical properties of amorphous Si–Ge–Te thin films prepared by combinatorial sputtering. |
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| Authors: | Mihai, C.1, Sava, F.1, Simandan, I. D.1, Galca, A. C.1, Burducea, I.2, Becherescu, N.3, Velea, A.1 alin.velea@infim.ro |
| Source: | Scientific Reports. 6/3/2021, Vol. 11 Issue 1, p1-15. 15p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 20452322 |
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| DOI: | 10.1038/s41598-021-91138-x |
