Smart-cut-like laser slicing of GaN substrate using its own nitrogen.
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| Title: | Smart-cut-like laser slicing of GaN substrate using its own nitrogen. |
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| Authors: | Tanaka, Atsushi1,2 a_tanaka@nuee.nagoya-u.ac.jp, Sugiura, Ryuji3, Kawaguchi, Daisuke3, Yui, Toshiki3, Wani, Yotaro3, Aratani, Tomomi3, Watanabe, Hirotaka1, Sena, Hadi1, Honda, Yoshio1, Igasaki, Yasunori3, Amano, Hiroshi1,2 |
| Source: | Scientific Reports. 9/9/2021, Vol. 11 Issue 1, p1-8. 8p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 20452322 |
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| DOI: | 10.1038/s41598-021-97159-w |
