Tanaka, A., Sugiura, R., Kawaguchi, D., Yui, T., Wani, Y., Aratani, T., . . . Amano, H. (2021). Smart-cut-like laser slicing of GaN substrate using its own nitrogen. Scientific Reports, 11(1), 1. https://doi.org/10.1038/s41598-021-97159-w
Chicago Style (17th ed.) CitationTanaka, Atsushi, et al. "Smart-cut-like Laser Slicing of GaN Substrate Using Its Own Nitrogen." Scientific Reports 11, no. 1 (2021): 1. https://doi.org/10.1038/s41598-021-97159-w.
MLA (9th ed.) CitationTanaka, Atsushi, et al. "Smart-cut-like Laser Slicing of GaN Substrate Using Its Own Nitrogen." Scientific Reports, vol. 11, no. 1, 2021, p. 1, https://doi.org/10.1038/s41598-021-97159-w.
Warning: These citations may not always be 100% accurate.