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Smart-cut-like laser slicing of GaN substrate using its own nitrogen.

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Title: Smart-cut-like laser slicing of GaN substrate using its own nitrogen.
Authors: Tanaka, Atsushi1,2 a_tanaka@nuee.nagoya-u.ac.jp, Sugiura, Ryuji3, Kawaguchi, Daisuke3, Yui, Toshiki3, Wani, Yotaro3, Aratani, Tomomi3, Watanabe, Hirotaka1, Sena, Hadi1, Honda, Yoshio1, Igasaki, Yasunori3, Amano, Hiroshi1,2
Source: Scientific Reports. 9/9/2021, Vol. 11 Issue 1, p1-8. 8p.
Database: Academic Search Ultimate
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  Data: Smart-cut-like laser slicing of GaN substrate using its own nitrogen.
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  Data: <searchLink fieldCode="JN" term="%22Scientific+Reports%22">Scientific Reports</searchLink>. 9/9/2021, Vol. 11 Issue 1, p1-8. 8p.
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        Value: 10.1038/s41598-021-97159-w
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              Text: 9/9/2021
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