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Gallium nitride wafer slicing by a sub-nanosecond laser: effect of pulse energy and laser shot spacing.

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Bibliographic Details
Title: Gallium nitride wafer slicing by a sub-nanosecond laser: effect of pulse energy and laser shot spacing.
Authors: Sena, Hadi1 (AUTHOR) sena@imass.nagoya-u.ac.jp, Tanaka, Atsushi1,2 (AUTHOR), Wani, Yotaro3 (AUTHOR), Aratani, Tomomi3 (AUTHOR), Yui, Toshiki3 (AUTHOR), Kawaguchi, Daisuke3 (AUTHOR), Sugiura, Ryuji3 (AUTHOR), Honda, Yoshio1 (AUTHOR), Igasaki, Yasunori3 (AUTHOR), Amano, Hiroshi1 (AUTHOR)
Source: Applied Physics A: Materials Science & Processing. Sep2021, Vol. 127 Issue 9, p1-8. 8p. 3 Color Photographs, 3 Black and White Photographs.
Database: Academic Search Ultimate
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Description
ISSN:09478396
DOI:10.1007/s00339-021-04808-y