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Gallium nitride wafer slicing by a sub-nanosecond laser: effect of pulse energy and laser shot spacing.

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Title: Gallium nitride wafer slicing by a sub-nanosecond laser: effect of pulse energy and laser shot spacing.
Authors: Sena, Hadi1 (AUTHOR) sena@imass.nagoya-u.ac.jp, Tanaka, Atsushi1,2 (AUTHOR), Wani, Yotaro3 (AUTHOR), Aratani, Tomomi3 (AUTHOR), Yui, Toshiki3 (AUTHOR), Kawaguchi, Daisuke3 (AUTHOR), Sugiura, Ryuji3 (AUTHOR), Honda, Yoshio1 (AUTHOR), Igasaki, Yasunori3 (AUTHOR), Amano, Hiroshi1 (AUTHOR)
Source: Applied Physics A: Materials Science & Processing. Sep2021, Vol. 127 Issue 9, p1-8. 8p. 3 Color Photographs, 3 Black and White Photographs.
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  Data: Gallium nitride wafer slicing by a sub-nanosecond laser: effect of pulse energy and laser shot spacing.
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  Data: <searchLink fieldCode="AR" term="%22Sena%2C+Hadi%22">Sena, Hadi</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> sena@imass.nagoya-u.ac.jp</i><br /><searchLink fieldCode="AR" term="%22Tanaka%2C+Atsushi%22">Tanaka, Atsushi</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wani%2C+Yotaro%22">Wani, Yotaro</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Aratani%2C+Tomomi%22">Aratani, Tomomi</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Yui%2C+Toshiki%22">Yui, Toshiki</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kawaguchi%2C+Daisuke%22">Kawaguchi, Daisuke</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Sugiura%2C+Ryuji%22">Sugiura, Ryuji</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Honda%2C+Yoshio%22">Honda, Yoshio</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Igasaki%2C+Yasunori%22">Igasaki, Yasunori</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Amano%2C+Hiroshi%22">Amano, Hiroshi</searchLink><relatesTo>1</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Applied+Physics+A%3A+Materials+Science+%26+Processing%22">Applied Physics A: Materials Science & Processing</searchLink>. Sep2021, Vol. 127 Issue 9, p1-8. 8p. 3 Color Photographs, 3 Black and White Photographs.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=152519830
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              Text: Sep2021
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              Y: 2021
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