Optimised magnetron sputtering method for the deposition of indium tin oxide layers.

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Bibliographic Details
Title:	Optimised magnetron sputtering method for the deposition of indium tin oxide layers.
Authors:	MUSZTYFAGA-STASZUK, Małgorzata¹ malgorzata.musztyfaga@polsl.pl, PUDIŠ, Dušan², SOCHA, Robert³, GAWLIŃSKA-NĘCEK, Katarzyna⁴, PANEK, Piotr⁴
Source:	Bulletin of the Polish Academy of Sciences: Technical Sciences. Dec2021, Vol. 69 Issue 6, p1-6. 6p.
Database:	Academic Search Ultimate

Description
ISSN:	02397528
DOI:	10.24425/bpasts.2021.139005