Optimised magnetron sputtering method for the deposition of indium tin oxide layers.
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| Title: | Optimised magnetron sputtering method for the deposition of indium tin oxide layers. |
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| Authors: | MUSZTYFAGA-STASZUK, Małgorzata1 malgorzata.musztyfaga@polsl.pl, PUDIŠ, Dušan2, SOCHA, Robert3, GAWLIŃSKA-NĘCEK, Katarzyna4, PANEK, Piotr4 |
| Source: | Bulletin of the Polish Academy of Sciences: Technical Sciences. Dec2021, Vol. 69 Issue 6, p1-6. 6p. |
| Database: | Academic Search Ultimate |
| ISSN: | 02397528 |
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| DOI: | 10.24425/bpasts.2021.139005 |
