Rapid formation of high aspect ratio through holes in thin glass substrates using an engineered, QCW laser approach.
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| Title: | Rapid formation of high aspect ratio through holes in thin glass substrates using an engineered, QCW laser approach. |
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| Authors: | Matsumoto, Hisashi1 (AUTHOR) Hisashi.Matsumoto@mksinst.com, Lin, Zhibin1 (AUTHOR), Schrauben, Joel N.1 (AUTHOR), Kleinert, Jan1 (AUTHOR), Vázquez, Rodrigo Gómez2 (AUTHOR), Buttazzoni, Michele2 (AUTHOR), Otto, Andreas2 (AUTHOR) |
| Source: | Applied Physics A: Materials Science & Processing. Apr2022, Vol. 128 Issue 4, p1-10. 10p. 3 Color Photographs, 2 Black and White Photographs, 3 Diagrams, 1 Graph. |
| Database: | Academic Search Ultimate |
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| FullText | Links: – Type: pdflink Text: Availability: 1 |
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| Header | DbId: asn DbLabel: Academic Search Ultimate An: 156495541 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Rapid formation of high aspect ratio through holes in thin glass substrates using an engineered, QCW laser approach. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AR" term="%22Matsumoto%2C+Hisashi%22">Matsumoto, Hisashi</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> Hisashi.Matsumoto@mksinst.com</i><br /><searchLink fieldCode="AR" term="%22Lin%2C+Zhibin%22">Lin, Zhibin</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Schrauben%2C+Joel+N%2E%22">Schrauben, Joel N.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kleinert%2C+Jan%22">Kleinert, Jan</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Vázquez%2C+Rodrigo+Gómez%22">Vázquez, Rodrigo Gómez</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Buttazzoni%2C+Michele%22">Buttazzoni, Michele</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Otto%2C+Andreas%22">Otto, Andreas</searchLink><relatesTo>2</relatesTo> (AUTHOR) – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Applied+Physics+A%3A+Materials+Science+%26+Processing%22">Applied Physics A: Materials Science & Processing</searchLink>. Apr2022, Vol. 128 Issue 4, p1-10. 10p. 3 Color Photographs, 2 Black and White Photographs, 3 Diagrams, 1 Graph. |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=156495541 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1007/s00339-022-05404-4 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 10 StartPage: 1 Titles: – TitleFull: Rapid formation of high aspect ratio through holes in thin glass substrates using an engineered, QCW laser approach. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Matsumoto, Hisashi – PersonEntity: Name: NameFull: Lin, Zhibin – PersonEntity: Name: NameFull: Schrauben, Joel N. – PersonEntity: Name: NameFull: Kleinert, Jan – PersonEntity: Name: NameFull: Vázquez, Rodrigo Gómez – PersonEntity: Name: NameFull: Buttazzoni, Michele – PersonEntity: Name: NameFull: Otto, Andreas IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 04 Text: Apr2022 Type: published Y: 2022 Identifiers: – Type: issn-print Value: 09478396 Numbering: – Type: volume Value: 128 – Type: issue Value: 4 Titles: – TitleFull: Applied Physics A: Materials Science & Processing Type: main |
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