Plasma parameters and tungsten sputter rates in a high-frequency CCP.
Saved in:
| Title: | Plasma parameters and tungsten sputter rates in a high-frequency CCP. |
|---|---|
| Authors: | Sackers, M.1 (AUTHOR) m.sackers@fz-juelich.de, Busch, C.2 (AUTHOR), Tsankov, Ts. V.2 (AUTHOR), Czarnetzki, U.2 (AUTHOR), Mertens, Ph.1 (AUTHOR), Marchuk, O.1 (AUTHOR) |
| Source: | Physics of Plasmas. Apr2022, Vol. 29 Issue 4, p1-17. 17p. |
| Database: | Academic Search Ultimate |
| ISSN: | 1070664X |
|---|---|
| DOI: | 10.1063/5.0083613 |
