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Plasma parameters and tungsten sputter rates in a high-frequency CCP.

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Title: Plasma parameters and tungsten sputter rates in a high-frequency CCP.
Authors: Sackers, M.1 (AUTHOR) m.sackers@fz-juelich.de, Busch, C.2 (AUTHOR), Tsankov, Ts. V.2 (AUTHOR), Czarnetzki, U.2 (AUTHOR), Mertens, Ph.1 (AUTHOR), Marchuk, O.1 (AUTHOR)
Source: Physics of Plasmas. Apr2022, Vol. 29 Issue 4, p1-17. 17p.
Database: Academic Search Ultimate
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DbLabel: Academic Search Ultimate
An: 156623065
AccessLevel: 2
PubType: Academic Journal
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PreciseRelevancyScore: 0
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  Data: Plasma parameters and tungsten sputter rates in a high-frequency CCP.
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  Data: <searchLink fieldCode="JN" term="%22Physics+of+Plasmas%22">Physics of Plasmas</searchLink>. Apr2022, Vol. 29 Issue 4, p1-17. 17p.
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        Value: 10.1063/5.0083613
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        Text: English
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      – TitleFull: Plasma parameters and tungsten sputter rates in a high-frequency CCP.
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              Text: Apr2022
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              Y: 2022
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