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Optimierung des Plasmaätzens von komplexen Geometrien dank des 3-D-Ätzindikator von PLATIT.

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Title: Optimierung des Plasmaätzens von komplexen Geometrien dank des 3-D-Ätzindikator von PLATIT.
Authors: Lümkemann, Andreas1, Zemlicka, Radek2, Yuan Li2, Tapp, Peter3, Bolvardi, Hamid4
Source: Diamant Hochleistungswerkzeuge. 2022, Issue 1, p18-21. 4p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
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PubType: Periodical
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  Data: Optimierung des Plasmaätzens von komplexen Geometrien dank des 3-D-Ätzindikator von PLATIT.
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  Data: <searchLink fieldCode="JN" term="%22Diamant+Hochleistungswerkzeuge%22">Diamant Hochleistungswerkzeuge</searchLink>. 2022, Issue 1, p18-21. 4p.
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      – Code: ger
        Text: German
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      – TitleFull: Optimierung des Plasmaätzens von komplexen Geometrien dank des 3-D-Ätzindikator von PLATIT.
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            NameFull: Yuan Li
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              Text: 2022
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