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Room-temperature bonding of Al2O3 thin films deposited using atomic layer deposition.

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Bibliographic Details
Title: Room-temperature bonding of Al2O3 thin films deposited using atomic layer deposition.
Authors: Takakura, Ryo1 (AUTHOR), Murakami, Seigo1 (AUTHOR), Watanabe, Kaname1 (AUTHOR), Takigawa, Ryo1 (AUTHOR) takigawa@ed.kyushu-u.ac.jp
Source: Scientific Reports. 3/3/2023, Vol. 13 Issue 1, p1-7. 7p.
Database: Academic Search Ultimate
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