Deep multilevel wet etching of fused silica glass microstructures in BOE solution.
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| Title: | Deep multilevel wet etching of fused silica glass microstructures in BOE solution. |
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| Authors: | Konstantinova, T. G.1,2 (AUTHOR), Andronic, M. M.1 (AUTHOR), Baklykov, D. A.1,2 (AUTHOR), Stukalova, V. E.1 (AUTHOR), Ezenkova, D. A.1,2 (AUTHOR), Zikiy, E. V.1,2 (AUTHOR), Bashinova, M. V.1 (AUTHOR), Solovev, A. A.1 (AUTHOR), Lotkov, E. S.1,2 (AUTHOR), Ryzhikov, I. A.1 (AUTHOR), Rodionov, I. A.1,2 (AUTHOR) irodionov@bmstu.ru |
| Source: | Scientific Reports. 3/30/2023, Vol. 13 Issue 1, p1-9. 9p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 20452322 |
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| DOI: | 10.1038/s41598-023-32503-w |
