APA (7th ed.) Citation

Konstantinova, T. G., Andronic, M. M., Baklykov, D. A., Stukalova, V. E., Ezenkova, D. A., Zikiy, E. V., . . . Rodionov, I. A. (2023). Deep multilevel wet etching of fused silica glass microstructures in BOE solution. Scientific Reports, 13(1), 1. https://doi.org/10.1038/s41598-023-32503-w

Chicago Style (17th ed.) Citation

Konstantinova, T. G., et al. "Deep Multilevel Wet Etching of Fused Silica Glass Microstructures in BOE Solution." Scientific Reports 13, no. 1 (2023): 1. https://doi.org/10.1038/s41598-023-32503-w.

MLA (9th ed.) Citation

Konstantinova, T. G., et al. "Deep Multilevel Wet Etching of Fused Silica Glass Microstructures in BOE Solution." Scientific Reports, vol. 13, no. 1, 2023, p. 1, https://doi.org/10.1038/s41598-023-32503-w.