Deep multilevel wet etching of fused silica glass microstructures in BOE solution.
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| Title: | Deep multilevel wet etching of fused silica glass microstructures in BOE solution. |
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| Authors: | Konstantinova, T. G.1,2 (AUTHOR), Andronic, M. M.1 (AUTHOR), Baklykov, D. A.1,2 (AUTHOR), Stukalova, V. E.1 (AUTHOR), Ezenkova, D. A.1,2 (AUTHOR), Zikiy, E. V.1,2 (AUTHOR), Bashinova, M. V.1 (AUTHOR), Solovev, A. A.1 (AUTHOR), Lotkov, E. S.1,2 (AUTHOR), Ryzhikov, I. A.1 (AUTHOR), Rodionov, I. A.1,2 (AUTHOR) irodionov@bmstu.ru |
| Source: | Scientific Reports. 3/30/2023, Vol. 13 Issue 1, p1-9. 9p. |
| Database: | Academic Search Ultimate |
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| Header | DbId: asn DbLabel: Academic Search Ultimate An: 162802270 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1038/s41598-023-32503-w Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 9 StartPage: 1 Titles: – TitleFull: Deep multilevel wet etching of fused silica glass microstructures in BOE solution. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Konstantinova, T. G. – PersonEntity: Name: NameFull: Andronic, M. M. – PersonEntity: Name: NameFull: Baklykov, D. A. – PersonEntity: Name: NameFull: Stukalova, V. E. – PersonEntity: Name: NameFull: Ezenkova, D. A. – PersonEntity: Name: NameFull: Zikiy, E. V. – PersonEntity: Name: NameFull: Bashinova, M. V. – PersonEntity: Name: NameFull: Solovev, A. A. – PersonEntity: Name: NameFull: Lotkov, E. S. – PersonEntity: Name: NameFull: Ryzhikov, I. A. – PersonEntity: Name: NameFull: Rodionov, I. A. IsPartOfRelationships: – BibEntity: Dates: – D: 30 M: 03 Text: 3/30/2023 Type: published Y: 2023 Identifiers: – Type: issn-print Value: 20452322 Numbering: – Type: volume Value: 13 – Type: issue Value: 1 Titles: – TitleFull: Scientific Reports Type: main |
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