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Ferroelectricity and Oxide Reliability of Stacked Hafnium–Zirconium Oxide Devices.

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Title: Ferroelectricity and Oxide Reliability of Stacked Hafnium–Zirconium Oxide Devices.
Authors: Liao, Ruo-Yin1 (AUTHOR) zoe051285.sc09@nycu.edu.tw, Chen, Hsuan-Han1 (AUTHOR) wahaha2900@gmail.com, Lin, Ping-Yu2 (AUTHOR) starlin527@gmail.com, Liang, Ting-An2 (AUTHOR) howmas13@gmail.com, Su, Kuan-Hung2 (AUTHOR) alien79412@hotmail.com, Lin, I-Cheng2 (AUTHOR) allan442211@gmail.com, Wen, Chen-Hao3 (AUTHOR) 61073021h@gapps.ntnu.edu.tw, Chou, Wu-Ching1 (AUTHOR) wcchou957@nycu.edu.tw, Hsu, Hsiao-Hsuan2 (AUTHOR) hhhsu@mail.ntut.edu.tw, Cheng, Chun-Hu3 (AUTHOR) hhhsu@mail.ntut.edu.tw
Source: Materials (1996-1944). May2023, Vol. 16 Issue 9, p3306. 10p.
Database: Academic Search Ultimate
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ISSN:19961944
DOI:10.3390/ma16093306