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High-Speed Microfabricated Silicon Turbomachinery and Fluid Film Bearings.

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Bibliographic Details
Title: High-Speed Microfabricated Silicon Turbomachinery and Fluid Film Bearings.
Authors: Fréchette, Luc G.1 Luc.Frechette@USherbrooke.ca, Jacobson, Stuart A.2, Breuer, Kenneth S.3, Ehrich, Fredric F.2, Ghodssi, Reza4, Khanna, Ravi2, Chee Wei Wong2, Xin Zhang5, Schmidt, Martin A.2, Epstein, Alan H.2
Source: Journal of Microelectromechanical Systems. Feb2005, Vol. 14 Issue 1, p141-152. 12p. 15 Black and White Photographs, 6 Diagrams, 2 Charts, 4 Graphs.
Database: Academic Search Ultimate
Description
ISSN:10577157
DOI:10.1109/JMEMS.2004.839008