Magnetron sputtering issues concerning growth of magnetic films: a technical approach to background, solutions, and outlook.
Saved in:
| Title: | Magnetron sputtering issues concerning growth of magnetic films: a technical approach to background, solutions, and outlook. |
|---|---|
| Authors: | Kosari Mehr, Ali1 (AUTHOR) Ali.Kosari.Mehr@kosartech.com, Kosari Mehr, Abbas2,3 (AUTHOR) |
| Source: | Applied Physics A: Materials Science & Processing. Sep2023, Vol. 129 Issue 9, p1-13. 13p. |
| Database: | Academic Search Ultimate |
|
Full text is not displayed to guests.
Login for full access.
|
|
| ISSN: | 09478396 |
|---|---|
| DOI: | 10.1007/s00339-023-06945-y |
