Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy.
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| Title: | Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy. |
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| Authors: | Ma, Xinyang1 (AUTHOR), Xiong, Rui1 (AUTHOR), Wang, Wei1,2 (AUTHOR) wei_w11@fudan.edu.cn, Zhang, Xiangchao1,3 (AUTHOR) wei_w11@fudan.edu.cn |
| Source: | Sensors (14248220). Dec2023, Vol. 23 Issue 23, p9526. 13p. |
| Database: | Academic Search Ultimate |
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