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Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy.

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Bibliographic Details
Title: Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy.
Authors: Ma, Xinyang1 (AUTHOR), Xiong, Rui1 (AUTHOR), Wang, Wei1,2 (AUTHOR) wei_w11@fudan.edu.cn, Zhang, Xiangchao1,3 (AUTHOR) wei_w11@fudan.edu.cn
Source: Sensors (14248220). Dec2023, Vol. 23 Issue 23, p9526. 13p.
Database: Academic Search Ultimate
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ISSN:14248220
DOI:10.3390/s23239526