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Effects of post-deposition annealing on BaTiO3/4H-SiC MOS capacitors using aerosol deposition method.

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Bibliographic Details
Title: Effects of post-deposition annealing on BaTiO3/4H-SiC MOS capacitors using aerosol deposition method.
Authors: Choi, Ji-Soo1 (AUTHOR), Lee, Hyun-Woo1 (AUTHOR), Lee, Tae-Hee1 (AUTHOR), Park, Se-Rim1 (AUTHOR), Chung, Seung-Hwan1 (AUTHOR), Cho, Young-Hun1 (AUTHOR), Lee, Geon-Hee1 (AUTHOR), Schweitz, Michael A.1 (AUTHOR), Park, Chulhwan2 (AUTHOR), Shin, Weon Ho1 (AUTHOR), Oh, Jong-Min1 (AUTHOR) jmOH@kw.ac.kr, Koo, Sang-Mo1 (AUTHOR) smkoo@kw.ac.kr
Source: Applied Physics A: Materials Science & Processing. Mar2024, Vol. 130 Issue 3, p1-9. 9p.
Database: Academic Search Ultimate
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Description
ISSN:09478396
DOI:10.1007/s00339-024-07285-1