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Aluminum Nitride Thin Film Piezoelectric Pressure Sensor for Respiratory Rate Detection.

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Bibliographic Details
Title: Aluminum Nitride Thin Film Piezoelectric Pressure Sensor for Respiratory Rate Detection.
Authors: Signore, Maria Assunta1 (AUTHOR) mariaassunta.signore@cnr.it, Rescio, Gabriele1 (AUTHOR) gabriele.rescio@cnr.it, Francioso, Luca1 (AUTHOR), Casino, Flavio1 (AUTHOR), Leone, Alessandro1 (AUTHOR)
Source: Sensors (14248220). Apr2024, Vol. 24 Issue 7, p2071. 13p.
Database: Academic Search Ultimate
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ISSN:14248220
DOI:10.3390/s24072071