Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications.
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| Title: | Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications. |
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| Authors: | Hwang, Jong-Jin1 (AUTHOR) gywns7078@hanyang.ac.kr, Sim, Hyo-Jun1 (AUTHOR), Moon, Seung-Jae1 (AUTHOR) smoon@hanyang.ac.kr |
| Source: | Sensors (14248220). Aug2024, Vol. 24 Issue 15, p5071. 11p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 14248220 |
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| DOI: | 10.3390/s24155071 |
