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Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications.

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Title: Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications.
Authors: Hwang, Jong-Jin1 (AUTHOR) gywns7078@hanyang.ac.kr, Sim, Hyo-Jun1 (AUTHOR), Moon, Seung-Jae1 (AUTHOR) smoon@hanyang.ac.kr
Source: Sensors (14248220). Aug2024, Vol. 24 Issue 15, p5071. 11p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 178950134
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Hwang%2C+Jong-Jin%22">Hwang, Jong-Jin</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> gywns7078@hanyang.ac.kr</i><br /><searchLink fieldCode="AR" term="%22Sim%2C+Hyo-Jun%22">Sim, Hyo-Jun</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Moon%2C+Seung-Jae%22">Moon, Seung-Jae</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> smoon@hanyang.ac.kr</i>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Sensors+%2814248220%29%22">Sensors (14248220)</searchLink>. Aug2024, Vol. 24 Issue 15, p5071. 11p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=178950134
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.3390/s24155071
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 11
        StartPage: 5071
    Titles:
      – TitleFull: Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Hwang, Jong-Jin
      – PersonEntity:
          Name:
            NameFull: Sim, Hyo-Jun
      – PersonEntity:
          Name:
            NameFull: Moon, Seung-Jae
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 08
              Text: Aug2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 14248220
          Numbering:
            – Type: volume
              Value: 24
            – Type: issue
              Value: 15
          Titles:
            – TitleFull: Sensors (14248220)
              Type: main
ResultId 1