Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia.
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| Title: | Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia. |
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| Authors: | Ermakova, E. N.1 (AUTHOR) ermakova@niic.nsc.ru, Maksimovsky, E. A.1 (AUTHOR), Fedorenko, A. D.1 (AUTHOR), Shapovalova, A. A.1 (AUTHOR), Khizhnyak, E. A.1 (AUTHOR), Kosinova, M. L.1 (AUTHOR) |
| Source: | Journal of Structural Chemistry. Aug2024, Vol. 65 Issue 8, p1488-1501. 14p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 00224766 |
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| DOI: | 10.1134/S002247662408002X |
