APA (7th ed.) Citation

Ermakova, E. N., Maksimovsky, E. A., Fedorenko, A. D., Shapovalova, A. A., Khizhnyak, E. A., & Kosinova, M. L. (2024). Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia. Journal of Structural Chemistry, 65(8), 1488. https://doi.org/10.1134/S002247662408002X

Chicago Style (17th ed.) Citation

Ermakova, E. N., E. A. Maksimovsky, A. D. Fedorenko, A. A. Shapovalova, E. A. Khizhnyak, and M. L. Kosinova. "Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia." Journal of Structural Chemistry 65, no. 8 (2024): 1488. https://doi.org/10.1134/S002247662408002X.

MLA (9th ed.) Citation

Ermakova, E. N., et al. "Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia." Journal of Structural Chemistry, vol. 65, no. 8, 2024, p. 1488, https://doi.org/10.1134/S002247662408002X.