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Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia.

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Title: Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia.
Authors: Ermakova, E. N.1 (AUTHOR) ermakova@niic.nsc.ru, Maksimovsky, E. A.1 (AUTHOR), Fedorenko, A. D.1 (AUTHOR), Shapovalova, A. A.1 (AUTHOR), Khizhnyak, E. A.1 (AUTHOR), Kosinova, M. L.1 (AUTHOR)
Source: Journal of Structural Chemistry. Aug2024, Vol. 65 Issue 8, p1488-1501. 14p.
Database: Academic Search Ultimate
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  Data: Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Structural+Chemistry%22">Journal of Structural Chemistry</searchLink>. Aug2024, Vol. 65 Issue 8, p1488-1501. 14p.
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        Value: 10.1134/S002247662408002X
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        Text: English
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      – TitleFull: Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia.
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            – D: 01
              M: 08
              Text: Aug2024
              Type: published
              Y: 2024
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