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Enhancing Ultrasonic Echo Response of AlN Thin Film Transducer Deposited by RF Magnetron Sputtering.

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Title: Enhancing Ultrasonic Echo Response of AlN Thin Film Transducer Deposited by RF Magnetron Sputtering.
Authors: Wang, Fengqi1 (AUTHOR) wangle_17@126.com, Ye, Qinyan1 (AUTHOR) yeqinyan@foxmail.com, Luo, Kun1 (AUTHOR), He, Xulin1 (AUTHOR), Ran, Xiaolong1 (AUTHOR), Zheng, Xingping1 (AUTHOR), Liao, Cheng1 (AUTHOR) yeqinyan@foxmail.com
Source: Sensors (14248220). Sep2024, Vol. 24 Issue 17, p5820. 12p.
Database: Academic Search Ultimate
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ISSN:14248220
DOI:10.3390/s24175820