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Influence of argon to oxygen flow ratio on tribological properties of Cr2O3-TiO2 films deposited by magnetron sputtering.

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Bibliographic Details
Title: Influence of argon to oxygen flow ratio on tribological properties of Cr2O3-TiO2 films deposited by magnetron sputtering.
Authors: Chen, Haijie1,2 (AUTHOR), Prastika, Bahdie Annisaa1,2 (AUTHOR), Zhang, Zihao1,2 (AUTHOR), Zhang, Chao1,2 (AUTHOR) zhangc@yzu.edu.cn
Source: Applied Physics A: Materials Science & Processing. Feb2025, Vol. 131 Issue 2, p1-10. 10p.
Database: Academic Search Ultimate
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ISSN:09478396
DOI:10.1007/s00339-025-08275-7