Non uniformities of silicon oxide films grown in peroxide mixtures
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| Title: | Non uniformities of silicon oxide films grown in peroxide mixtures |
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| Authors: | Bertagna, V.1 valerie.bertagna@univ-orleans.fr, Petitdidier, S.2, Rochat, N.2, Rouchon, D.2, Besson, P.3, Erre, R.1, Chemla, M.4 |
| Source: | Journal of Electroanalytical Chemistry. Oct2005, Vol. 584 Issue 1, p54-62. 9p. |
| Database: | Academic Search Ultimate |
| ISSN: | 15726657 |
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| DOI: | 10.1016/j.jelechem.2004.10.028 |
