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SEM, EDX, AFM, and XPS analysis of surface microstructure and chemical composition of nanograting patterns on silicon substrates.

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Bibliographic Details
Title:	SEM, EDX, AFM, and XPS analysis of surface microstructure and chemical composition of nanograting patterns on silicon substrates.
Authors:	Gorji, Nima E.¹ (AUTHOR) nima.gorji@tudublin.ie, Pieniążek, Agnieszka^2,3 (AUTHOR), Iancu, Alexandru⁴ (AUTHOR), Norek, Malgorzata² (AUTHOR), Couteau, Christophe⁵ (AUTHOR), Deturche, Regis⁵ (AUTHOR), Tavkhelidze, Avtandil⁶ (AUTHOR), Bibilashvili, Amiran⁷ (AUTHOR), Jangidze, Larissa^6,7 (AUTHOR)
Source:	Optical & Quantum Electronics. Apr2025, Vol. 57 Issue 4, p1-13. 13p.
Database:	Academic Search Ultimate
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Description
ISSN:	03068919
DOI:	10.1007/s11082-025-08106-2