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SEM, EDX, AFM, and XPS analysis of surface microstructure and chemical composition of nanograting patterns on silicon substrates.

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Title: SEM, EDX, AFM, and XPS analysis of surface microstructure and chemical composition of nanograting patterns on silicon substrates.
Authors: Gorji, Nima E.1 (AUTHOR) nima.gorji@tudublin.ie, Pieniążek, Agnieszka2,3 (AUTHOR), Iancu, Alexandru4 (AUTHOR), Norek, Malgorzata2 (AUTHOR), Couteau, Christophe5 (AUTHOR), Deturche, Regis5 (AUTHOR), Tavkhelidze, Avtandil6 (AUTHOR), Bibilashvili, Amiran7 (AUTHOR), Jangidze, Larissa6,7 (AUTHOR)
Source: Optical & Quantum Electronics. Apr2025, Vol. 57 Issue 4, p1-13. 13p.
Database: Academic Search Ultimate
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  Data: SEM, EDX, AFM, and XPS analysis of surface microstructure and chemical composition of nanograting patterns on silicon substrates.
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  Data: <searchLink fieldCode="JN" term="%22Optical+%26+Quantum+Electronics%22">Optical & Quantum Electronics</searchLink>. Apr2025, Vol. 57 Issue 4, p1-13. 13p.
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        Value: 10.1007/s11082-025-08106-2
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              Text: Apr2025
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