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Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering.

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Title: Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering.
Authors: Nguyen, Tai1 (AUTHOR) tai.nguyen@silicon-austria.com, Ghosh, Anirban1 (AUTHOR), Dao, Thang Duy1 (AUTHOR), Koblar, Maja2 (AUTHOR), Drazic, Goran2,3 (AUTHOR), Andrianov, Nikolai1 (AUTHOR), Nesterenko, Iurii1 (AUTHOR), Nayak, Sanjay1 (AUTHOR), Miranda, Joaquin1 (AUTHOR), Golob, Andreja Bencan2 (AUTHOR), Moridi, Mohssen1 (AUTHOR), Deluca, Marco1 (AUTHOR)
Source: Advanced Science. 6/20/2025, Vol. 12 Issue 23, p1-10. 10p.
Database: Academic Search Ultimate
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ISSN:21983844
DOI:10.1002/advs.202500611