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Knowledge based full aperture polishing.

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Bibliographic Details
Title: Knowledge based full aperture polishing.
Authors: Schneckenburger, Max1 (AUTHOR) max.schneckenburger@asml.com, Shaikh, Ayaan1,2 (AUTHOR), Algac, Ufuc1,3 (AUTHOR), Mewis, Jan1 (AUTHOR)
Source: Journal of the European Optical Society. 1/22/2025, Vol. 21 Issue 1, p1-12. 12p.
Database: Academic Search Ultimate
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Description
ISSN:19902573
DOI:10.1051/jeos/2025026