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Knowledge based full aperture polishing.

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Bibliographic Details
Title:	Knowledge based full aperture polishing.
Authors:	Schneckenburger, Max¹ (AUTHOR) max.schneckenburger@asml.com, Shaikh, Ayaan^1,2 (AUTHOR), Algac, Ufuc^1,3 (AUTHOR), Mewis, Jan¹ (AUTHOR)
Source:	Journal of the European Optical Society. 1/22/2025, Vol. 21 Issue 1, p1-12. 12p.
Database:	Academic Search Ultimate
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Description
ISSN:	19902573
DOI:	10.1051/jeos/2025026