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Knowledge based full aperture polishing.

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Title: Knowledge based full aperture polishing.
Authors: Schneckenburger, Max1 (AUTHOR) max.schneckenburger@asml.com, Shaikh, Ayaan1,2 (AUTHOR), Algac, Ufuc1,3 (AUTHOR), Mewis, Jan1 (AUTHOR)
Source: Journal of the European Optical Society. 1/22/2025, Vol. 21 Issue 1, p1-12. 12p.
Database: Academic Search Ultimate
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+European+Optical+Society%22">Journal of the European Optical Society</searchLink>. 1/22/2025, Vol. 21 Issue 1, p1-12. 12p.
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RecordInfo BibRecord:
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        Value: 10.1051/jeos/2025026
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      – Code: eng
        Text: English
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      – TitleFull: Knowledge based full aperture polishing.
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            NameFull: Shaikh, Ayaan
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              Text: 1/22/2025
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              Y: 2025
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