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Controllable Material Removal via Diffusion-Assisted Etching at the Atomic Scale.

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Title: Controllable Material Removal via Diffusion-Assisted Etching at the Atomic Scale.
Authors: An, Haojie1,2 (AUTHOR), Wang, Jinshi2 (AUTHOR) jswang@tju.edu.cn, Xu, Zongwei2 (AUTHOR)
Source: Nanomanufacturing & Metrology. 9/16/2025, Vol. 8 Issue 1, p1-14. 14p.
Database: Academic Search Ultimate
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  Data: Controllable Material Removal via Diffusion-Assisted Etching at the Atomic Scale.
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  Data: <searchLink fieldCode="JN" term="%22Nanomanufacturing+%26+Metrology%22">Nanomanufacturing & Metrology</searchLink>. 9/16/2025, Vol. 8 Issue 1, p1-14. 14p.
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        Value: 10.1007/s41871-025-00277-6
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        Text: English
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      – TitleFull: Controllable Material Removal via Diffusion-Assisted Etching at the Atomic Scale.
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            NameFull: An, Haojie
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            NameFull: Wang, Jinshi
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              Text: 9/16/2025
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