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Interference Field Control for High-Uniformity Nanopatterning: A Review.

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Bibliographic Details
Title: Interference Field Control for High-Uniformity Nanopatterning: A Review.
Authors: Li, Jingwen1 (AUTHOR), Li, Xinghui1 (AUTHOR) li.xinghui@sz.tsinghua.edu.cn
Source: Sensors (14248220). Sep2025, Vol. 25 Issue 18, p5719. 32p.
Database: Academic Search Ultimate
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ISSN:14248220
DOI:10.3390/s25185719