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Morphological and Functional Evolution of Amorphous AlN Thin Films Deposited by RF-Magnetron Sputtering.

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Bibliographic Details
Title:	Morphological and Functional Evolution of Amorphous AlN Thin Films Deposited by RF-Magnetron Sputtering.
Authors:	Zai, Maria-Iulia^1,2 (AUTHOR), Lalau, Ioana^1,2,3 (AUTHOR), Manica, Marina^1,3,4 (AUTHOR), Chiriacescu, Lucia^1,4,5 (AUTHOR), Antohe, Vlad-Andrei^1,5,6 (AUTHOR), Gheorghiu, Cristina C.^2,6 (AUTHOR), Iftimie, Sorina^1,7 (AUTHOR), Toma, Ovidiu^1,8 (AUTHOR), Suchea, Mirela Petruta^1,4,7 (AUTHOR), Antohe, Ștefan^1,2,7,8 (AUTHOR)
Source:	Surfaces (2571-9637). Sep2025, Vol. 8 Issue 3, p51. 22p.
Database:	Academic Search Ultimate
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ISSN:	25719637
DOI:	10.3390/surfaces8030051