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Morphological and Functional Evolution of Amorphous AlN Thin Films Deposited by RF-Magnetron Sputtering.

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Title: Morphological and Functional Evolution of Amorphous AlN Thin Films Deposited by RF-Magnetron Sputtering.
Authors: Zai, Maria-Iulia1,2 (AUTHOR), Lalau, Ioana1,2,3 (AUTHOR), Manica, Marina1,3,4 (AUTHOR), Chiriacescu, Lucia1,4,5 (AUTHOR), Antohe, Vlad-Andrei1,5,6 (AUTHOR), Gheorghiu, Cristina C.2,6 (AUTHOR), Iftimie, Sorina1,7 (AUTHOR), Toma, Ovidiu1,8 (AUTHOR), Suchea, Mirela Petruta1,4,7 (AUTHOR), Antohe, Ștefan1,2,7,8 (AUTHOR)
Source: Surfaces (2571-9637). Sep2025, Vol. 8 Issue 3, p51. 22p.
Database: Academic Search Ultimate
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  Data: Morphological and Functional Evolution of Amorphous AlN Thin Films Deposited by RF-Magnetron Sputtering.
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              M: 09
              Text: Sep2025
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