High-k TiO2 dielectric thin films by atomic layer deposition on InAlN/GaN and ScAlN/GaN heterostructures.
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| Title: | High-k TiO |
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| Authors: | Nepal, Neeraj1 (AUTHOR) neeraj.nepal.civ@us.navy.mil, Downey, Brian P.1 (AUTHOR), Hardy, Matthew T.1 (AUTHOR), Meyer, David J.1 (AUTHOR), Wheeler, Virginia D.1 (AUTHOR) |
| Source: | APL Electronic Devices. Sep2025, Vol. 1 Issue 3, p1-10. 10p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 29958423 |
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| DOI: | 10.1063/5.0274769 |
