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High-k TiO2 dielectric thin films by atomic layer deposition on InAlN/GaN and ScAlN/GaN heterostructures.

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Title: High-k TiO2 dielectric thin films by atomic layer deposition on InAlN/GaN and ScAlN/GaN heterostructures.
Authors: Nepal, Neeraj1 (AUTHOR) neeraj.nepal.civ@us.navy.mil, Downey, Brian P.1 (AUTHOR), Hardy, Matthew T.1 (AUTHOR), Meyer, David J.1 (AUTHOR), Wheeler, Virginia D.1 (AUTHOR)
Source: APL Electronic Devices. Sep2025, Vol. 1 Issue 3, p1-10. 10p.
Database: Academic Search Ultimate
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  Data: High-k TiO<subscript>2</subscript> dielectric thin films by atomic layer deposition on InAlN/GaN and ScAlN/GaN heterostructures.
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  Data: <searchLink fieldCode="AR" term="%22Nepal%2C+Neeraj%22">Nepal, Neeraj</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> neeraj.nepal.civ@us.navy.mil</i><br /><searchLink fieldCode="AR" term="%22Downey%2C+Brian+P%2E%22">Downey, Brian P.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Hardy%2C+Matthew+T%2E%22">Hardy, Matthew T.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Meyer%2C+David+J%2E%22">Meyer, David J.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wheeler%2C+Virginia+D%2E%22">Wheeler, Virginia D.</searchLink><relatesTo>1</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22APL+Electronic+Devices%22">APL Electronic Devices</searchLink>. Sep2025, Vol. 1 Issue 3, p1-10. 10p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=188430402
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        Value: 10.1063/5.0274769
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        Text: English
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      – TitleFull: High-k TiO2 dielectric thin films by atomic layer deposition on InAlN/GaN and ScAlN/GaN heterostructures.
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              M: 09
              Text: Sep2025
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              Y: 2025
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