RF sputtered Ga2O3 thin-films for solar-blind UV-C detection: Investigating effects of crystallinity, stoichiometry, and ambient.
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| Title: | RF sputtered Ga |
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| Authors: | Sharma, Sidhant1 (AUTHOR), Le, Phuong Y.2 (AUTHOR) hiep.tranlengoc@rmit.edu.au, Allen, Martin W.3,4 (AUTHOR), Partridge, Jim G.2 (AUTHOR), Tran, Hiep N.1 (AUTHOR) |
| Source: | APL Electronic Devices. Sep2025, Vol. 1 Issue 3, p1-10. 10p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 29958423 |
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| DOI: | 10.1063/5.0293906 |
