Multiphysics Optical–Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber †.
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| Title: | Multiphysics Optical–Thermal and Mechanical Modeling of a CMOS-SOI-MEMS Infrared Sensor with Metasurface Absorber †. |
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| Authors: | Avraham, Moshe1 (AUTHOR), Nemirovsky, Yael1 (AUTHOR) nemirov@ee.technion.ac.il |
| Source: | Sensors (14248220). Nov2025, Vol. 25 Issue 22, p6819. 24p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 14248220 |
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| DOI: | 10.3390/s25226819 |
