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The Effect of Co/TiN Interfaces on Co Interconnect Resistivity.

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Bibliographic Details
Title: The Effect of Co/TiN Interfaces on Co Interconnect Resistivity.
Authors: Shen, Poyen1 (AUTHOR), Rahman, Sanzida1 (AUTHOR), Syracuse, Daniel M.1 (AUTHOR), Gall, Daniel1 (AUTHOR) galld@rpi.edu
Source: Surfaces (2571-9637). Dec2025, Vol. 8 Issue 4, p89. 15p.
Database: Academic Search Ultimate
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ISSN:25719637
DOI:10.3390/surfaces8040089