The Effect of Co/TiN Interfaces on Co Interconnect Resistivity.

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Title: The Effect of Co/TiN Interfaces on Co Interconnect Resistivity.
Authors: Shen, Poyen1 (AUTHOR), Rahman, Sanzida1 (AUTHOR), Syracuse, Daniel M.1 (AUTHOR), Gall, Daniel1 (AUTHOR) galld@rpi.edu
Source: Surfaces (2571-9637). Dec2025, Vol. 8 Issue 4, p89. 15p.
Database: Academic Search Ultimate
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  Data: The Effect of Co/TiN Interfaces on Co Interconnect Resistivity.
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=190543385
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      – Type: doi
        Value: 10.3390/surfaces8040089
    Languages:
      – Code: eng
        Text: English
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        PageCount: 15
        StartPage: 89
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      – TitleFull: The Effect of Co/TiN Interfaces on Co Interconnect Resistivity.
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            NameFull: Shen, Poyen
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            NameFull: Rahman, Sanzida
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            NameFull: Syracuse, Daniel M.
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              M: 12
              Text: Dec2025
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              Y: 2025
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              Value: 8
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