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Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical Behavior.

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Bibliographic Details
Title:	Hole-Patterned Pellicles: A Structural Approach for Improved Extreme Ultraviolet Transmittance and Mechanical Behavior.
Authors:	Kim, Haneul^1,2 (AUTHOR), Kim, Jungyeon^1,2 (AUTHOR), Kang, Young Woo^1,2,3 (AUTHOR), Lee, Taeho^2,4 (AUTHOR), Kim, Min-Woo^1,3 (AUTHOR), Ha, Tae Joong^2,4 (AUTHOR), Oh, Hye-Keun³ (AUTHOR), Ahn, Jinho^1,2,4 (AUTHOR) jhahn@hanyang.ac.kr
Source:	Materials (1996-1944). Jan2026, Vol. 19 Issue 1, p56. 14p.
Database:	Academic Search Ultimate
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ISSN:	19961944
DOI:	10.3390/ma19010056